TY - JOUR AU - Purnapu Rupa, P. K. AU - Chakraborti, P. C. AU - Mishra, S. K. PY - 2011/04/22 Y2 - 2024/03/29 TI - Indentation Response and Contact Damage of Hard T-B-N Films Deposited by Magnetron Sputtering JF - Eurasian Chemico-Technological Journal JA - Eurasian Chem.-Technol. J. VL - 13 IS - 1-2 SE - Articles DO - 10.18321/ectj70 UR - https://ect-journal.kz/index.php/ectj/article/view/438 SP - 81-84 AB - <p><span style="color: #000000; font-family: Verdana, Arial, Helvetica, sans-serif; font-size: 11.2px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial; display: inline !important; float: none;">Titanium-boron-nitride (Ti-B-N) films were deposited by reactive magnetron sputtering using a single TiB</span><sub style="color: #000000; font-family: Verdana, Arial, Helvetica, sans-serif; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;">2</sub><span style="color: #000000; font-family: Verdana, Arial, Helvetica, sans-serif; font-size: 11.2px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial; display: inline !important; float: none;">&nbsp;target. The films were deposited under different Ar:N</span><sub style="color: #000000; font-family: Verdana, Arial, Helvetica, sans-serif; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;">2</sub><span style="color: #000000; font-family: Verdana, Arial, Helvetica, sans-serif; font-size: 11.2px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial; display: inline !important; float: none;">&nbsp;ratios. The instrumented indentation technique (nanoindentation), is used to evaluate the mechanical properties of the films. A methodology is presented to evaluate the critical load to failure directly from the load depth curves. Significant effect of Ar:N</span><sub style="color: #000000; font-family: Verdana, Arial, Helvetica, sans-serif; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial;">2</sub><span style="color: #000000; font-family: Verdana, Arial, Helvetica, sans-serif; font-size: 11.2px; font-style: normal; font-variant-ligatures: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-text-stroke-width: 0px; background-color: #ffffff; text-decoration-style: initial; text-decoration-color: initial; display: inline !important; float: none;">&nbsp;ratio was observed on the mechanical properties of the Ti-B-N films.</span></p> ER -