Beisenov RE, Ebrahim R, Zommorodian A, Mansurov ZA, Tokmoldin SZ, Ignatiev A. AES Studies of Heteroepitaxial SiC Films Deposited on Si and on Sapphire Substrates by MOCVD. Eurasian Chem.-Technol. J. [Internet]. 2013 Jul. 25 [cited 2024 Nov. 23];15(3):259-63. Available from: https://ect-journal.kz/index.php/ectj/article/view/332